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Specifications

  • Full Scale Flow Range
    100 to 250 slm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    25 to 45 psid (with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for > 20% to 100% Full Scale
    ±0.2% of Full Scale for 2% to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Reading
  • Zero Temperature Coefficient
    < 0.05% of Full Scale/°C
  • Span Temperature Coefficient
    < 0.08% of Reading/°C
  • Inlet Pressure Coefficient
    < 0.02% of Reading/psi
  • Typical Settling Time
    < 3 sec typical above 10% Full Scale @ 50 psi
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • Temperature Display
    0 to 85°C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Fitting Type
    Swagelok® 8 VCR®
  • External Leak Integrity
    < 1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    < 1.0% of configured Full Scale at 40 psia to vac (<500 mTorr)
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy, 430FR, Buna-N, nickel, polyimide
  • Surface Finish
    10 µinch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE Compliant to 89/336/EEC
  • DeviceNet Input Power Required
    +11 to +25 VDC per DeviceNet™ specification (@ < 9 watts)
  • DeviceNet Connector
    5 pin microconnnector
  • DeviceNet Data Rate Switch Selection
    4 positions: 125, 250, 500K (Default), GM (programmable over the network)
  • DeviceNet Network Size
    Up to 64 nodes
  • DeviceNet Network Topology
    Linear (trunkline/dropline) power and signal on same network cable

Accessories

Compare Description Drawings, CAD & Specs Avail. Price
CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.
In Stock
$137
CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft.
14 Weeks
$93
CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.
In Stock
$179
100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.
In Stock
$160
100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.
8 Weeks
$276
wa01220-01 mass flow controller cable100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.
In Stock
$104
100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.
10 Weeks
$117
100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.
8 Weeks
$186
100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.
1 Week
$511

Resources

Application Notes

Drawings & CADs

Literature