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NOVA® 2 MHz RF Plasma Generators

Model: nova-rf-plasma-generators

Type
RF Plasma Generator
Frequency Tuning Range
2.00 MHz ±0.005%
Load Impedance Range
Unlimited
RF Stability/Spurious Output
Unconditionally stable for any load within operational limits <-50dBc
Harmonic Output & Distortion
<-40dBc
Load Mismatch Protection
Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
Regulation Tolerance
>500 W: <2.0% SP
<500 W: ±5.0 W
Input AC Power
200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
RF Connector
Type HN

Readout
Digital readout displays frequency and forward, reflected and load power.
Remote Digital Interface
Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.
Rack Mounting
19-inch adapters supplied
Cooling System
Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.
Dimensions
8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)
Weight
91 lbs (41.3 kg)
Compliance
CE, UL 3111-1, CAN/CSA-C22.2 No.1010.1-92

Type
RF Plasma Generator
Frequency Tuning Range
2.00 MHz ±0.005%
Load Impedance Range
Unlimited
RF Stability/Spurious Output
Unconditionally stable for any load within operational limits <-50dBc
Harmonic Output & Distortion
<-40dBc
Load Mismatch Protection
Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
Regulation Tolerance
>500 W: <2.0% SP
<500 W: ±5.0 W
Input AC Power
200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
RF Connector
Type HN

Readout
Digital readout displays frequency and forward, reflected and load power.
Remote Digital Interface
Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.
Rack Mounting
19-inch adapters supplied
Cooling System
Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.
Dimensions
8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)
Weight
91 lbs (41.3 kg)
Compliance
CE, UL 3111-1, CAN/CSA-C22.2 No.1010.1-92

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