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LIQUOZON® HeliO3 12-49 ppm, 60 lpm, Modular Dissolved Ozone Delivery System
LIQUOZON® HeliO3 12-49 ppm, 60 lpm, Modular Dissolved Ozone Delivery System
The LIQUOZON® HeliO3 is specially designed for solar applications such as cleaning, surface conditioning and oxide growth. The ozonated water delivery system is a powerful source for wet processing with ozone and/or chemical mixtures such as acids with ozone. The system is comprised of at least two modules: a self-contained stand-alone Gas Module and a Wet Module that integrates in the customer’s TOOL. Several combinations including closed loop control and special safety features are available.
Specifications
- TypeLIQUOZON® HeliO3 Ozone Water Delivery System
- Ozone GeneratorAX8407LS-D-01
- Ozone Concentration12 - 49 ppm
- Flow Rate60 lpm, higher flow rates possible in bypass mode
- Feed GasO2
- Feed Gas Quality≥Grade 4.0 (purity ≥99.99%), dew point <-40°C
- Feed Gas Flow Rate≤8 slm, typ. 4.8 slm, according to SEMI E12 (0°C / 1.01325 bar) standard
- Feed Gas Inlet Pressure4.5-7.6 barg (0.45-0.76 MPag, 65-110 psig)
- Dopant GasCO2
- Dopant Gas Quality≥Grade 4.5 (purity . 99.995%) dew point ≥40°C
- Dopant Gas Flow Rate≤0.3 slm, typ. 0.2 slm, according to SEMI E12 (0°C / 1.01325 bar) standard
- Dopant Gas Inlet Pressure5.0-7.6 barg (0.50-0.76 MPag, 73-110 psig)
- N2 Dopant Gas Purity Required≥Grade 4.0 (purity ≥99.99%), dew point <-40°C
- N2 Dopant Gas Pressure Required4.5-7.6 barg (0.45-0.76 MPag, 65-110 psig)
- N2 Dopant Gas Standard Flow Rate Required≤0.8 sccm, typ. 0.5 sccm, according to SEMI E12 (0°C / 1.01325 bar)
- Compressed Dry Air Standard Flow Rate Required≤10 slm, typ. 2 slm, according to SEMI E12 (0°C / 1.01325 bar)
- Compressed Dry Air Purity RequiredFiltrated (free of oils & particles)
- Compressed Dry Air Pressure Required5.2-8.2 barg (0.52-0.82 MPag, 75-119 psig)
- Cooling Water Flow RecommendedTyp. 3.8 L/min
- Cooling Water PressureMax. 5.0 barg (0.5 MPag, 73 psig)
- Cooling Water Temperature17 - 23°C, rated 20°C
- Cooling Water Differential Pressure Required≥2.0 bar (0.2 MPa, 29 psi)
- Cooling Water QualityDemineralized, filtrated (≤20µm)
- Cooling Water Resistivity (Conductivity) Required50-3000 kΩ-cm (20 - 0.33 µS/cm)
- Cooling Water pH Value Required7.0 - 8.0
- Gas Module12-14100-01300-2M00
- Gas Module MaterialCoated steel
- Gas Module Power Supply Frequency50-60 Hz
- Gas Module Power Supply Class of ProtectionIP 40
- Gas Module Power Supply Collective Apparent power2000 VA
- Gas Module Power Supply Phases3/N/PE~
- Gas Module Power Supply RMS Full Load Phase CurrentMax. 3.8 A
- Gas Module Power Supply Collective True Power1980 W
- Gas Module Power Supply Voltage400 V ±10%
- Wet Module12-21A-1000A-0000
- Wet Module MaterialPP
- Wetted SurfacesGas: 316L stainless steel, PFA, PTFE
Liquid: PFA, PTFE, FFKM - Wet Module - Process Liquid IN - supplied from TOOLDeionized ozonized water with HF and HCl up to 10 wt% each, free of silicon wafer fragments
Pressure: 0.5-2.5 barg (0.05-0.25 MPag, 7-36 psig)
Temperature: 15 - 50°C
Flow Rate: Max. 60 L/min - Control InterfacesBinary in/out (dry contacts), RS232, RS485, USB
- ComplianceCE, SEMI S2-0302, SEMI F47
Resources
Drawings & CADs
LIQUOZON® HeliO3 Dimensional Drawings(1.3 MB, PDF)
Literature
LIQUOZON® HeliO3 Dissolved Ozone Delivery System (archived)(859.5 kB, PDF)