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LIQUOZON® Single Compact 5-95 ppm, 20 lpm Ozone Water Delivery System

Model: liquozon-compact-ozone-water-system

Type
LIQUOZON® Single 20 slm Ozone Water Delivery System
Ozone Concentration
5 - 95 ppm
Flow Rate
0.5 - 20 lpm
Operating Pressure
Constant set point configurable from 1.0 to 2.5 bar_gauge (15-36 psig)
Closed-loop controlled, nominal pressure: 2.5 bar_gauge (36 psig)
Feed Gas
O2
Feed Gas Quality
Oxygen, grade 4 (purity > 99.99%) or better
Feed Gas Inlet Pressure
4.5-7.6 bar_gauge (65-110 psig)
Dopant Gas
CO2
Dopant Gas Quality
Carbon Dioxide, grade 4.5 (purity > 99.995%) or better
Dopant Gas Flow Rate
Typically 0.15 slm
Dopant Gas Inlet Pressure
5.0-7.6 bar_gauge (73 - 110 psig)
UPW Pressure
1.8-5.0 bar_gauge (26 - 73 psig), min. 0.8 bar (12 psi) above system operating pressure
UPW Purity
Purity according to process demands

UPW Temperature
15 - 25°C (59 - 77°F)
Cooling Water Flow Recommended
14-0041-222: Typically 1.5 L/min (0.4 gpm)
14-0042-222: Typically 2.3 L/min (0.61 gpm)
14-0044-222: Typically 3.7 L/min (0.98 gpm)
Cooling Water Pressure
2.0-5.0 bar_gauge (29 - 73 psig)
Cooling Water Temperature
17 - 23°C (63 - 73°F), rated 20°C (68°F)
Cooling Water Quality
Demineralized (Resistivity > 50 kΩ cm), 100µm filtered
Ambient Temperature
Max. 35°C (95°F)
Control Interfaces
Discrete communication, RS232
Power
14-0041-222: 3/PE~, 208 VAC, 50/60 Hz 0.500 kVA
14-0042-222: 3/PE~, 208 VAC, 50/60 Hz 0.850 kVA
14-0044-222: 3/PE~, 208 VAC, 50/60 Hz 1.600 kVA
Dimensions
412 x 512 x 1215 mm (16.2 x 20.2 x 47.8 inches )
Weight
135 kg (298 lbs.)
Compliance
CE, SEMI S2-0302, SEMI F47, SEMI S2, UL 61010-1

Type
LIQUOZON® Single 20 slm Ozone Water Delivery System
Ozone Concentration
5 - 95 ppm
Flow Rate
0.5 - 20 lpm
Operating Pressure
Constant set point configurable from 1.0 to 2.5 bar_gauge (15-36 psig)
Closed-loop controlled, nominal pressure: 2.5 bar_gauge (36 psig)
Feed Gas
O2
Feed Gas Quality
Oxygen, grade 4 (purity > 99.99%) or better
Feed Gas Inlet Pressure
4.5-7.6 bar_gauge (65-110 psig)
Dopant Gas
CO2
Dopant Gas Quality
Carbon Dioxide, grade 4.5 (purity > 99.995%) or better
Dopant Gas Flow Rate
Typically 0.15 slm
Dopant Gas Inlet Pressure
5.0-7.6 bar_gauge (73 - 110 psig)
UPW Pressure
1.8-5.0 bar_gauge (26 - 73 psig), min. 0.8 bar (12 psi) above system operating pressure
UPW Purity
Purity according to process demands

UPW Temperature
15 - 25°C (59 - 77°F)
Cooling Water Flow Recommended
14-0041-222: Typically 1.5 L/min (0.4 gpm)
14-0042-222: Typically 2.3 L/min (0.61 gpm)
14-0044-222: Typically 3.7 L/min (0.98 gpm)
Cooling Water Pressure
2.0-5.0 bar_gauge (29 - 73 psig)
Cooling Water Temperature
17 - 23°C (63 - 73°F), rated 20°C (68°F)
Cooling Water Quality
Demineralized (Resistivity > 50 kΩ cm), 100µm filtered
Ambient Temperature
Max. 35°C (95°F)
Control Interfaces
Discrete communication, RS232
Power
14-0041-222: 3/PE~, 208 VAC, 50/60 Hz 0.500 kVA
14-0042-222: 3/PE~, 208 VAC, 50/60 Hz 0.850 kVA
14-0044-222: 3/PE~, 208 VAC, 50/60 Hz 1.600 kVA
Dimensions
412 x 512 x 1215 mm (16.2 x 20.2 x 47.8 inches )
Weight
135 kg (298 lbs.)
Compliance
CE, SEMI S2-0302, SEMI F47, SEMI S2, UL 61010-1

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