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E27E 0.1-1000 Torr Heated (45°C) Baratron® Ethernet Capacitance Manometer with Etch Sensor
Model: e27e-heated-capacitance-manometers-etch-sensor
E27E 0.1-1000 Torr Heated (45°C) Baratron® Ethernet Capacitance Manometer with Etch Sensor
Model: e27e-heated-capacitance-manometers-etch-sensor

Overview
Overview
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer with Etch Baffle Sensor
- Measurement TypeAbsolute
- Sensor TemperatureControlled to 45°C
- Full Scale Pressure Ranges0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr
- Accuracy0.10% Reading for ranges of 1 Torr or higher
0.15% Reading for 0.1 and 0.25 Torr ranges - Resolution0.001% Full Scale
- Communication ProtocolEthernet
- Analog Output0 - 10 VDC into > 10 kΩ load
- Analog Connector9-pin or 15-pin D-subminiature
- Digital ConnectorRJ45 receptacle
- Zero Temperature Coefficient0.002% Full Scale/°C for all models of 1 Torr and higher
0.005% Full Scale/°C for 0.1 Torr range
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15° to 40°C
- Volume6.3 cc
- Warm-up Time2 Hours for greater than 1 Torr Full Scale
4 Hours for less than 1 Torr Full Scale - Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is higher
- Materials Exposed to Process GasesInconel®
- Power Requirements±15 VDC ±5% or 24 VDC ±5% @ 300 mA
- IndicatorsMulticolor status LED and two (2) green LEDs for Ethernet communications status
- ComplianceCE, SEMI S2-93
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer with Etch Baffle Sensor
- Measurement TypeAbsolute
- Sensor TemperatureControlled to 45°C
- Full Scale Pressure Ranges0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr
- Accuracy0.10% Reading for ranges of 1 Torr or higher
0.15% Reading for 0.1 and 0.25 Torr ranges - Resolution0.001% Full Scale
- Communication ProtocolEthernet
- Analog Output0 - 10 VDC into > 10 kΩ load
- Analog Connector9-pin or 15-pin D-subminiature
- Digital ConnectorRJ45 receptacle
- Zero Temperature Coefficient0.002% Full Scale/°C for all models of 1 Torr and higher
0.005% Full Scale/°C for 0.1 Torr range
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15° to 40°C
- Volume6.3 cc
- Warm-up Time2 Hours for greater than 1 Torr Full Scale
4 Hours for less than 1 Torr Full Scale - Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is higher
- Materials Exposed to Process GasesInconel®
- Power Requirements±15 VDC ±5% or 24 VDC ±5% @ 300 mA
- IndicatorsMulticolor status LED and two (2) green LEDs for Ethernet communications status
- ComplianceCE, SEMI S2-93
Resources & Downloads
Manuals
626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs(22.4 kB, PDF)
Literature
627E / 628E / E27E / E28E Baratron® (Archive)(256.5 kB, PDF)