R-Series Vacuum Gate Valve
Model: GVRA
R-Series Vacuum Gate Valve
Model: GVRA
Overview
Overview
The GVRA Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R Series is available with a range of options, including pneumatic and manual actuator and lock out tag out capability. The R Series employs an elastomer shaft seal for the actuator seal, which enables high performance in a cost effective, high value package for roughing vacuum applications. The stainless steel version of the R Series Gate valve is available in DN80, DN100, and DN160 sizes.
Technical Specs
- TypeGate Valve
- Flange SizeD160
- Seal MaterialKalrez 9500
- ActuationManual
- Actuation Time<2 sec
- Actuator Temperature10 - 80°C
- Limit SwitchesValve Closed Continuity
- Limit SwitchMagnetic Reed Switch: Current rating <80 mA
- Pressure Range1* 10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
- MaterialAluminum
- Actuator SealElastomer shaft seal
- Bypass Option8mm (Flow Orifice Diameter)
- HeatingHeatable to 150°C
- Solenoids120 VAC 50/60 Hz
- Solenoid Temperature10 - 50°C
- Body Temperature10 - 150°C (seal dependent)
- Pneumatic Pressure5.4 ±1.3 atm (80 ±20 psig)
- Side to Side Leak Rate1* 10-9 atm*cc/sec
- External Leak Rate1* 10-9 atm*cc/sec
- Max Delta Pressure - Operating<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar. - Max Delta Pressure - Closed1.6 atm, either direction
- Maintenance100,000 - 200,000 cycles before maintenance (valve bore size dependent)
Technical Specs
- TypeGate Valve
- Flange SizeD160
- Seal MaterialKalrez 9500
- ActuationManual
- Actuation Time<2 sec
- Actuator Temperature10 - 80°C
- Limit SwitchesValve Closed Continuity
- Limit SwitchMagnetic Reed Switch: Current rating <80 mA
- Pressure Range1* 10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
- MaterialAluminum
- Actuator SealElastomer shaft seal
- Bypass Option8mm (Flow Orifice Diameter)
- HeatingHeatable to 150°C
- Solenoids120 VAC 50/60 Hz
- Solenoid Temperature10 - 50°C
- Body Temperature10 - 150°C (seal dependent)
- Pneumatic Pressure5.4 ±1.3 atm (80 ±20 psig)
- Side to Side Leak Rate1* 10-9 atm*cc/sec
- External Leak Rate1* 10-9 atm*cc/sec
- Max Delta Pressure - Operating<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar. - Max Delta Pressure - Closed1.6 atm, either direction
- Maintenance100,000 - 200,000 cycles before maintenance (valve bore size dependent)