Technical Specs

  • Absolute Measurement Range
    1 x 10-8 Torr to Atmosphere
  • Digital Communication
    RS485, RS232 or EtherCAT
  • Type
    Vacuum Transducer
  • Sensor
    Cold Cathode - MicroPirani™
  • Relays
    3 relays, SPST
  • Installation Orientation
    Any
  • Set Point Range
    1 x 10-8 Torr to Atmosphere
  • Calibration Gas
    Nitrogen
  • Operating Temperature
    0-40°C (32-104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
  • Digital Status
    Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
  • Analog Output
    0.5 VDC per decade
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Power Requirements
    9-30 VDC, 2 W
  • Accuracy
    5 x 10-8 Torr to 10-3 ± 30% of reading
    10-3 to 100 ±5% of reading
  • Repeatability
    5 x 10-8 Torr to 10-3 ± 30% of reading
    10-3 to 100 ±2% of reading
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    21 cc
  • Exposed Materials
    304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    12.7 oz (360 g)
  • Compliance
    CE
  • Connectors
    RS232 or RS485: 15-pin D-subminiature male
    EtherCAT: One 15-pin D-subminiature male, Two RJ45 female

Technical Specs

  • Absolute Measurement Range
    1 x 10-8 Torr to Atmosphere
  • Digital Communication
    RS485, RS232 or EtherCAT
  • Type
    Vacuum Transducer
  • Sensor
    Cold Cathode - MicroPirani™
  • Relays
    3 relays, SPST
  • Installation Orientation
    Any
  • Set Point Range
    1 x 10-8 Torr to Atmosphere
  • Calibration Gas
    Nitrogen
  • Operating Temperature
    0-40°C (32-104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
  • Digital Status
    Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
  • Analog Output
    0.5 VDC per decade
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Power Requirements
    9-30 VDC, 2 W
  • Accuracy
    5 x 10-8 Torr to 10-3 ± 30% of reading
    10-3 to 100 ±5% of reading
  • Repeatability
    5 x 10-8 Torr to 10-3 ± 30% of reading
    10-3 to 100 ±2% of reading
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    21 cc
  • Exposed Materials
    304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    12.7 oz (360 g)
  • Compliance
    CE
  • Connectors
    RS232 or RS485: 15-pin D-subminiature male
    EtherCAT: One 15-pin D-subminiature male, Two RJ45 female

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