972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Model: 972b-dualmag-cold-cathode-transducer
972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Model: 972b-dualmag-cold-cathode-transducer
Technical Specs
Absolute Measurement Range
1 x 10-8 Torr to Atmosphere
Digital Communication
RS485, RS232 or EtherCAT
Type
Vacuum Transducer
Sensor
Cold Cathode - MicroPirani™
Relays
3 relays, SPST
Installation Orientation
Any
Set Point Range
1 x 10-8 Torr to Atmosphere
Calibration Gas
Nitrogen
Operating Temperature
0-40°C (32-104°F)
Maximum Bakeout Temperature
85°C (185°F), non-operating
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9-30 VDC, 2 W
Accuracy
5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±5% of reading
Repeatability
5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±2% of reading
Overpressure Limit
1500 Torr
Internal Volume
21 cc
Exposed Materials
304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
Electronic Casing and Flange
304 stainless steel
Weight
12.7 oz (360 g)
Compliance
CE
Connectors
RS232 or RS485: 15-pin D-subminiature male
EtherCAT: One 15-pin D-subminiature male, Two RJ45 female
Technical Specs
Absolute Measurement Range
1 x 10-8 Torr to Atmosphere
Digital Communication
RS485, RS232 or EtherCAT
Type
Vacuum Transducer
Sensor
Cold Cathode - MicroPirani™
Relays
3 relays, SPST
Installation Orientation
Any
Set Point Range
1 x 10-8 Torr to Atmosphere
Calibration Gas
Nitrogen
Operating Temperature
0-40°C (32-104°F)
Maximum Bakeout Temperature
85°C (185°F), non-operating
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9-30 VDC, 2 W
Accuracy
5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±5% of reading
Repeatability
5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±2% of reading
Overpressure Limit
1500 Torr
Internal Volume
21 cc
Exposed Materials
304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
Electronic Casing and Flange
304 stainless steel
Weight
12.7 oz (360 g)
Compliance
CE
Connectors
RS232 or RS485: 15-pin D-subminiature male
EtherCAT: One 15-pin D-subminiature male, Two RJ45 female
Resources & Downloads
Literature
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual(129.6 kB, PDF)
- 971, 972, 974 Vacuum Transducer Pin-outs(60.8 kB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335)(925.8 kB, PDF)
- 972B DualMag™ Transducer Manual (100017133, Ref. K)(2.8 MB, PDF)
- 971B, 972B, 974B Anode/Cathode Replacement Procedure(106.8 kB, PDF)
Drawings & CADs
Device Description Files