Technical Specs

  • Digital Communication
    RS485, RS232 or EtherCAT
  • Sensor
    Stainless steel enclosed Piezo (Absolute Pressure)
  • Relays
    Three relays SPDT
    EtherCAT 1 relay SPDT
    (Optional)
  • Installation Orientation
    Any
  • Measurement Range
    0.1-1000 Torr
  • Set Point Range
    1-1000 Torr
  • Operating Temperature
    0-40°C (32-104°F)
  • Maximum Bakeout Temperature
    100°C (non-operating)
  • Analog Output
    0-10 VDC, 100 Ω maximum output impedance, linear or logarithmic
    (Absolute Pressure)
  • Analog Output Resolution
    16 bit
  • Relay Contact Rating
    1 A @ 30 VAC/VDC resistive
  • Relay Response
    100 ms maximum
  • Power Requirements
    9 to 30 VDC < 1.2 watt maximum
    EtherCAT 24V ±15%
  • Accuracy
    100-1000 Torr ±1% of Reading
    10-100 Torr ±5% of Reading
  • Repeatability
    100-1000 Torr ±0.3% of Reading
    10-100 Torr ±1% of Reading
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    1.023 cc (KF16)
  • Exposed Materials
    316 Stainless Steel
  • Electronic Casing and Flange
    304 Stainless Steel
  • Weight
    0.37 lb (170 g) with KF16 flange
  • Compliance
    CE, ETG 5003.1, ETG 5003.2, ETG 5003.2080
  • Digital Output Resolution
    0.1 Torr
  • Zero Temperature Coefficient
    0.01% of Full Scale/°C
  • Span Temperature Coefficient
    0.02% of Reading/°C

Technical Specs

  • Digital Communication
    RS485, RS232 or EtherCAT
  • Sensor
    Stainless steel enclosed Piezo (Absolute Pressure)
  • Relays
    Three relays SPDT
    EtherCAT 1 relay SPDT
    (Optional)
  • Installation Orientation
    Any
  • Measurement Range
    0.1-1000 Torr
  • Set Point Range
    1-1000 Torr
  • Operating Temperature
    0-40°C (32-104°F)
  • Maximum Bakeout Temperature
    100°C (non-operating)
  • Analog Output
    0-10 VDC, 100 Ω maximum output impedance, linear or logarithmic
    (Absolute Pressure)
  • Analog Output Resolution
    16 bit
  • Relay Contact Rating
    1 A @ 30 VAC/VDC resistive
  • Relay Response
    100 ms maximum
  • Power Requirements
    9 to 30 VDC < 1.2 watt maximum
    EtherCAT 24V ±15%
  • Accuracy
    100-1000 Torr ±1% of Reading
    10-100 Torr ±5% of Reading
  • Repeatability
    100-1000 Torr ±0.3% of Reading
    10-100 Torr ±1% of Reading
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    1.023 cc (KF16)
  • Exposed Materials
    316 Stainless Steel
  • Electronic Casing and Flange
    304 Stainless Steel
  • Weight
    0.37 lb (170 g) with KF16 flange
  • Compliance
    CE, ETG 5003.1, ETG 5003.2, ETG 5003.2080
  • Digital Output Resolution
    0.1 Torr
  • Zero Temperature Coefficient
    0.01% of Full Scale/°C
  • Span Temperature Coefficient
    0.02% of Reading/°C

Need help?

Contact an Applications Specialist by sending us an email