901P MicroPirani™ - Piezo Loadlock Vacuum Transducer
Model: 901p-micro-pirani-vacuum-transducer
901P MicroPirani™ - Piezo Loadlock Vacuum Transducer
Model: 901p-micro-pirani-vacuum-transducer
Overview
Overview
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationRS485/RS232 (4800 to 230400 Baud)
- SensorMicroPirani™ (MEMS Thermal Conductivity)
Piezo differential (MEMS diaphragm) - Relays3 relays SPDT (optional)
- Set Point RangeAbsolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 Torr
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
- Operating Temperature0° to 40°C (32° to 104°F)
- Maximum Bakeout Temperature85°C (185°F), non-operating
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusAbsolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog OutputAbsolute Pressure: 1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance (16 bit)
- Optional Analog Output 2Piezo Differential: 5 VDC = 0 Torr, 1 VDC/decade (12 bit)
- Relay Contact Rating1 A @ 3 0VAC/DC, resistive
- Relay Response100 msec maximum
- Power RequirementsRS232/RS485: 9 to 30 VDC, < 1.2 watts max
EtherCAT: 9 to 30 VDC, < 2 watts max - MicroPirani Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of reading
1 x 10-3 to 100 Torr ±5% of reading
100 Torr to Atm ±25% of reading - MicroPirani Repeatability1 x 10-3 to 100 Torr ±2% of reading
- Piezo Differential Accuracy-10 to +10 Torr ±10% of reading
-100 to -10 Torr ±8% of reading
-760 to -100 Torr ±1% of reading
+10 to 100 Torr ±5% of reading - Piezo Differential Repeatability-760 to +10 Torr ±1% of reading
- Piezo Differential Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr)
- Overpressure Limit1500 Torr (Absolute)
- Internal Volume(KF16) 2.8 cc
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
- Electronic Casing and Flange304 stainless steel
- Weight170 g (with KF 16 Flange)
- ComplianceCE
Technical Specs
- Absolute Measurement Range1.0 x 10-5 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationRS485/RS232 (4800 to 230400 Baud)
- SensorMicroPirani™ (MEMS Thermal Conductivity)
Piezo differential (MEMS diaphragm) - Relays3 relays SPDT (optional)
- Set Point RangeAbsolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 Torr
- Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
- Operating Temperature0° to 40°C (32° to 104°F)
- Maximum Bakeout Temperature85°C (185°F), non-operating
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
- Digital StatusAbsolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog OutputAbsolute Pressure: 1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance (16 bit)
- Optional Analog Output 2Piezo Differential: 5 VDC = 0 Torr, 1 VDC/decade (12 bit)
- Relay Contact Rating1 A @ 3 0VAC/DC, resistive
- Relay Response100 msec maximum
- Power RequirementsRS232/RS485: 9 to 30 VDC, < 1.2 watts max
EtherCAT: 9 to 30 VDC, < 2 watts max - MicroPirani Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of reading
1 x 10-3 to 100 Torr ±5% of reading
100 Torr to Atm ±25% of reading - MicroPirani Repeatability1 x 10-3 to 100 Torr ±2% of reading
- Piezo Differential Accuracy-10 to +10 Torr ±10% of reading
-100 to -10 Torr ±8% of reading
-760 to -100 Torr ±1% of reading
+10 to 100 Torr ±5% of reading - Piezo Differential Repeatability-760 to +10 Torr ±1% of reading
- Piezo Differential Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr)
- Overpressure Limit1500 Torr (Absolute)
- Internal Volume(KF16) 2.8 cc
- Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
- Electronic Casing and Flange304 stainless steel
- Weight170 g (with KF 16 Flange)
- ComplianceCE
Resources & Downloads
Literature
901P Micropirani/Piezo Loadlock Transducer(330.6 kB, PDF) Vacuum Measurement Product Guide(711.5 kB, PDF)
Manuals
901P Loadlock Transducer Manual (100017121, Rev. L)(2.6 MB, PDF) 900 Series Vacuum Transducer USB Adapter Manual(129.6 kB, PDF) 901P Transducer Standard Version Setup Instructionss(199.8 kB, PDF) 901/901 Plus Vacuum Sensor Pin-outs(983.3 kB, PDF) 900 Series EtherCAT Communication Protocol Manual (20003335)(925.8 kB, PDF)
Drawings & CADs
901P Vacuum Transducer Dimensional Drawing(87.7 kB, PDF)
Application Notes
Optimized Loadlock Pressure Sensing with the 901P Transducer(256.6 kB, PDF)
Device Description Files
901P EtherCAT Slave Information (ESI) File(166.8 kB, XML)