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628E 0.1-1000 Torr Heated (100°C) Baratron® Ethernet Capacitance Manometers
Model: 628e-ethernet-absolute-capacitance-manometers
628E 0.1-1000 Torr Heated (100°C) Baratron® Ethernet Capacitance Manometers
Model: 628e-ethernet-absolute-capacitance-manometers

Overview
Overview
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer
- Measurement TypeAbsolute
- Sensor TemperatureControlled to 100°C
- Full Scale Pressure Ranges0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr
- Accuracy0.25% of Reading for ranges of 1 Torr or higher
0.50% of Reading for 0.1 and 0.25 Torr ranges - Resolution0.001% Full Scale
- Communication ProtocolEthernet
- Analog Output0 to 10 VDC into > 10 kΩ load
- Analog Connector9 or 15-pin D-subminiature
- Digital ConnectorRJ45 receptacle
- Zero Temperature Coefficient0.002% Full Scale/°C for 1 Torr and higher
0.01% Full Scale/°C for 0.1 Torr range
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15° to 50°C
- Volume6.3 cc
- Warm-up Time2 Hours for greater than 1 Torr Full Scale
4 Hours for less than 1 Torr Full Scale - Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is higher
- Materials Exposed to Process GasesInconel®
- Power Requirements±15VDC ± 5% or +24VDC ± 5% @ 600 mA
- IndicatorsMulticolor status LED and two (2) green LEDs for Ethernet communications status
- ComplianceCE, SEMI S2-93
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer
- Measurement TypeAbsolute
- Sensor TemperatureControlled to 100°C
- Full Scale Pressure Ranges0.1, 0.25, 1, 2, 10, 20, 100, 500, 1000 Torr
- Accuracy0.25% of Reading for ranges of 1 Torr or higher
0.50% of Reading for 0.1 and 0.25 Torr ranges - Resolution0.001% Full Scale
- Communication ProtocolEthernet
- Analog Output0 to 10 VDC into > 10 kΩ load
- Analog Connector9 or 15-pin D-subminiature
- Digital ConnectorRJ45 receptacle
- Zero Temperature Coefficient0.002% Full Scale/°C for 1 Torr and higher
0.01% Full Scale/°C for 0.1 Torr range
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15° to 50°C
- Volume6.3 cc
- Warm-up Time2 Hours for greater than 1 Torr Full Scale
4 Hours for less than 1 Torr Full Scale - Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is higher
- Materials Exposed to Process GasesInconel®
- Power Requirements±15VDC ± 5% or +24VDC ± 5% @ 600 mA
- IndicatorsMulticolor status LED and two (2) green LEDs for Ethernet communications status
- ComplianceCE, SEMI S2-93
Resources & Downloads
Literature
627E / 628E / E27E / E28E Baratron® (Archive)(256.5 kB, PDF)
Drawings & CADs
628E Baratron® Capacitance Manometer Dimensional Drawing(101.1 kB, PDF)