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1640A Metal-sealed Pressure-based 2-20 sccm Mass Flow Controller

Model: 1640a-mass-flow-controller

Type
Pressure-based Mass Flow Controller
Full Scale Flow Range
2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent)
Maximum Inlet Pressure
5 psig
Control Range
5% to 100% of Full Scale
Typical Accuracy
Gas/flow rate dependent
Repeatability
± 0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.02% of Full Scale/°C
Span Temperature Coefficient
<0.2% of Rdg./°C
Warm-up Time
30 minutes
Typical Settling Time
<5 sec
Operating Temperature
0° to 50°C

Power Requirements
± 15 VDC (± 5%) @ 200 mA
Set Point Command Signal
0 to 5 VDC from <20K Ω
Flow Input Output Signal
0 to 5 VDC into >10K Ω
Wetted Materials
316L S.S., nickel, Inconel®
Valve Seat Material
Kel-F®, Chemraz® or Kalrez®
External Leak Integrity
<1 x 10^-9
Leak Integrity Through Closed Valve
1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
Fitting Type
Swagelok® 4 VCR®
Compliance
CE

Type
Pressure-based Mass Flow Controller
Full Scale Flow Range
2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent)
Maximum Inlet Pressure
5 psig
Control Range
5% to 100% of Full Scale
Typical Accuracy
Gas/flow rate dependent
Repeatability
± 0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.02% of Full Scale/°C
Span Temperature Coefficient
<0.2% of Rdg./°C
Warm-up Time
30 minutes
Typical Settling Time
<5 sec
Operating Temperature
0° to 50°C

Power Requirements
± 15 VDC (± 5%) @ 200 mA
Set Point Command Signal
0 to 5 VDC from <20K Ω
Flow Input Output Signal
0 to 5 VDC into >10K Ω
Wetted Materials
316L S.S., nickel, Inconel®
Valve Seat Material
Kel-F®, Chemraz® or Kalrez®
External Leak Integrity
<1 x 10^-9
Leak Integrity Through Closed Valve
1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
Fitting Type
Swagelok® 4 VCR®
Compliance
CE

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