The RPDG-200 is a 20,000W Asymmetric Bipolar Pulsed DC system that enables deposition of a wide variety of low defect insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. The system is comprised of a pulse master unit driving a 20kW DC slave providing up to 20kW in a single output.
20,000 W asymmetric bipolar pulsed DC generator
For Reactive* PVD, CVD Bias and Hard Coating
Programmable frequency and duty cycle
Independent bias power supply for superior management of reverse excursion
Specifications
Type
RPDG-200 20kW Pulsed DC Plasma Generator
Frequency
Programmable from 25 to 125 kHz or 50 to 250 kHz (Range set by factory)
Duty Cycle
Programmable from 0 to 40% (Reverse Bias)
Power Output
20kW
Power Limit
21kW for rated 20kW output; proportional at other power levels
Current Limit
42A
Regulation Modes
Volts, Amps, Watts
Output Control Modes
Ramping, Run Time, Joule, Sequence, Constant Run
DC Linearity/Accuracy Independent of Regulation Mode
±0.1%: 10-100% of rated output
DC Linearity/Accuracy in Watts Mode
±0.25%: 1-10% of rated output
Line Regulation
±0.1% for ±10% line voltage change ±2% line frequency change
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