MKS Announces Release of Ultra-Fast C-Series Mass Flow Controllers

Delivering ultra-fast response time for high precision flow control

Andover, Mass., - October 22, 2019 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, today announced the release of its next generation C-Series Mass Flow Controllers.

C-Series Ultrafast Mass Flow Controller

The C-Series Mass Flow Controller uses Micro-Electromechanical Systems (MEMS) technology combined with a fast-acting control valve and MKS' proprietary algorithms resulting in an ultra-fast control time of less than 100 milliseconds. Designed for use with non-corrosive gases and accommodating a wide flow range from 50 sccm to 50 slm, the C-Series is ideal for many advanced markets that require high-precision flow control including, but not limited to, Analytical, Biopharmaceutical and Industrial applications. "By leveraging MEMS technology, we provide the optimum solution for critical process applications requiring precise gas flow control under the most demanding conditions across multiple industries," said Michael Patterson, General Manager of Flow Solutions Products.

The C-Series product is available in several configurations with multiple I/Os, process connections and flow ranges to address a wide variety of customer applications. Find out more about the product here.

About MKS Instruments

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration control, optics and laser-based manufacturing solutions. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include semiconductor, industrial technologies, life and health sciences, research and defense. Additional information can be found at