UHV Ultra-high Vacuum Isolation Valves are lightweight and have a compact profile, enabling it to fit easily into vacuum systems where space is tight. MKS has optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.
- NW25 - NW40
- Ultra-high vacuum system applications
- Metal bonnet seal limits outgassing and permeation for a lower base pressure
- Spring-to-close, air-to-open pneumatic valve See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | UHV-25-ACC-ELVNUHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic | In Stock | ||||
![]() | UHV-40-ACC-ELVNUHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic | In Stock | ||||
![]() | UHV-40-ACC-EMVMUHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual | In Stock | ||||
![]() | UHV-40-ICC-ELVNUHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic | 15 Weeks |
Configuration Options
Please see the UHV Valve datasheet for available product options.
Specifications
- TypeUltra-high Vacuum Valve
- Vacuum RangeAtmosphere to 10-9 Torr
- Body ConfigurationOffset Inline
- Port SizeNW25, NW40
- Flange SizeISO-KF 25, ISO-KF 40, CF 2.75 in. depending on configuration
- Flange TypeISO-KF, CF, or Tube
- ActuationManual or Pneumatic
- Limit SwitchOptional
- SealViton
- Bonnet SealCopper or Viton
Features
TIG Fusion-welded body
Another standard feature is a TIG fusion-welded body made of high grade, corrosion resistant 304 stainless steel for significantly fewer entrapment areas, resulting in less contaminants. The body is available with a choice of bead blasted or electropolished finishes.
UHV Applications
The UHV Valve is a compact vacuum valve designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and other applications that require an ultraclean environment.
Accessories
Replacement Solenoids
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt | 14 Weeks | ||||
![]() | 100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt | 14 Weeks | ||||
![]() | 100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt | 15 Weeks | ||||
![]() | 100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt | 15 Weeks | ||||
![]() | 100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt | 15 Weeks | ||||
![]() | 100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt | 15 Weeks |
Valve Seals
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100010361O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Valve, NW25 Port | 4 Weeks | ||||
![]() | 100010362O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Pneumatic Valve, NW40 Port | 4 Weeks | ||||
![]() | 100010363O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Manual Valve, NW40 Port | 4 Weeks | ||||
![]() | 100011771O-Ring Seals, Viton, UHV Valve, NW25 Port | 4 Weeks | ||||
![]() | 100011772O-Ring Seals, Viton, Pneumatic UHV Valve, NW40 Port | 4 Weeks | ||||
![]() | 100011773O-Ring Seals, Viton, Manual UHV Valve, NW40 Port | 4 Weeks |
Limit Switches
Internal Rebuild Kits
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 100011774Valve Rebuild Kit with Viton Seal Set, Pneumatic UHV Valves, NW25 | 4 Weeks | ||||
![]() | 100002652Pneumatic Valve Rebuild Kit, Viton Nose, Copper Bonnet, UHV Valve, NW25 | 4 Weeks | ||||
![]() | 100009979Valve Rebuild Kit, Viton Nose, Copper Bonnet, Manual UHV Valves, NW40 | 4 Weeks | ||||
![]() | 100009978Valve Rebuild Kit, Viton Nose, Copper Bonnet, Pneumatic UHV Valves, NW40 | 6 Weeks | ||||
![]() | 100011775Valve Rebuild Kit with Viton Seal Set, Pneumatic UHV Valves, NW40 | 4 Weeks | ||||
![]() | 100011776Valve Rebuild Kit with Viton Seal Set, Manual UHV Valves, NW40 | 4 Weeks |
Resources
Literature
Ultra High Vacuum Valves(512.1 kB, PDF)
Manuals
UHV Valve Manual(675.8 kB, PDF)













