Sorry, this product is no longer offered for sale. The recommended replacement product is e29h-heated-capacitance-manometers-etch-sensor.
The E29F Etch Manometer is temperature controlled to either 45°C or 100°C, and includes efficient temperature control electronics to provide superior long-term stability and repeatability.
Specifications
- TypeVacuum Pressure Transducer
- Sensor TypeCapacitance Manometer with Etch Baffle Sensor
- Measurement TypeAbsolute
- Sensor TemperatureControlled to 45°C or 100°C
- Full Scale Pressure Ranges0.02 (45°C only), 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, 20000, 25000 Torr
- Analog Output0 - 10 VDC into >10K Ω load
- Analog Connector9-pin D-sub
- Span Temperature Coefficient0.02% of Reading/°C
- Ambient Operating Temperature45°C version: 15° to 40°C
100°C version: 15° to 50°C - Volume6.3 cc
- Warm-up Time2 hours for 1-25,000 Torr ranges
4 hours for ranges < 1 Torr - Overpressure Limit45 psia (310 kPa) or 120% Full Scale, whichever is greater
- Materials Exposed to Process GasesInconel®
- Power Requirements±15 VDC±5% @ 0.25 Amps (0.6 Amps for 100°C version)
- ComplianceCE
Resources
Manuals
629 and E29 Capacitance Manometer Pin-outs(21.8 kB, PDF) E29D Baratron® Heated Absolute Capacitance Manometer, Etch Sensor Manual(410.5 kB, PDF)
Literature
Drawings & CADs
E29 Dimensional Drawing(126.9 kB, PDF)
