ALD, CVD Process High Sensitivity RGA
Model: VISION-2000-A-XD
ALD, CVD Process High Sensitivity RGA
ALD, CVD Process High Sensitivity RGA
Model: VISION-2000-A-XD
Overview
Overview
The Vision 2000-A XD Residual Gas Analyzer (RGA) improves process productivity and product quality by providing real-time trace level monitoring of various gas species, including precursors, reaction byproducts, and contaminants during ALD and CVD processes. The Vision 2000-A XD system incorporates MKS’ patented V-lens™ technology, taking the proven performance of the Vision 2000-A XD system to a higher level of sensitivity and reliability, previously unachievable with conventional quadrupole mass spectrometry systems (QMS). The V-lens design provides increased sensitivity and reproducibility for the most challenging applications, such as tracking levels of various gas species or reaction byproducts during ALD and CVD deposition processes. With V-lens technology, process engineers can identify and prevent potentially costly issues faster and easier while maximizing yield.
Technical Specs
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Mass Range1-100, 1-200, or 1-300 amu
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Ion SourceHigh conductance closed ion source
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FilamentsIndependently replaceable twin Tungsten or Thoria filaments
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Mass FilterDouble filter (1 inch "RF only" pre-filter with 4 inch main filter)
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DetectorDual (Faraday and secondary electron multiplier)
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Maximum Analyzer Operating Pressure1e-3 Torr at the ion source inlet (standard), higher pressure optional
Ultra-High Velocity