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NOVA® 2 MHz RF Plasma Generators
Model: NOVA-25A
NOVA® 2 MHz RF Plasma Generators
Model: NOVA-25A
Overview
Overview
The NOVA®-25A 2.5 kW, 2 MHz RF Plasma Generator offers advanced RF plasma generation and control for low cost and high yield in the most demanding thin film processing applications. NOVA RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
Technical Specs
- TypeRF Plasma Generator
- Frequency2.00 MHz ±0.005%
- Dynamic Power Range10 - 2500 W
- Power Output2.5 kW
- Load Impedance RangeUnlimited
- RF Stability/Spurious OutputUnconditionally stable for any load within operational limits <-50 dBc
- Harmonic Output & Distortion<-40 dBc
- Load Mismatch ProtectionAutomatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
- Regulation Tolerance>250 W: <2.0% SP, <250 W: ±2.5 W
- Input AC Power200/208 VAC, 3/PE~ (3W+G) 16A/PHASE
- RF ConnectorType N
- InterfaceStandard: RS-232 Subminiature, Type-D 9-pin digital, optional custom interface cards available.
- ReadoutDigital readout displays frequency and forward, reflected and load power.
- Rack Mounting19-inch adapters supplied
- CoolingWater
- Cooling SystemWater flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
- DimensionsRack Mount: 5.25 x 19 x 20.5 inches (133 x 483 x 521 mm.) (height x width x depth) (excluding handles & connectors)
- Weight55 lbs (24.9 kg)
- ComplianceNRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995
Technical Specs
- TypeRF Plasma Generator
- Frequency2.00 MHz ±0.005%
- Dynamic Power Range10 - 2500 W
- Power Output2.5 kW
- Load Impedance RangeUnlimited
- RF Stability/Spurious OutputUnconditionally stable for any load within operational limits <-50 dBc
- Harmonic Output & Distortion<-40 dBc
- Load Mismatch ProtectionAutomatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
- Regulation Tolerance>250 W: <2.0% SP, <250 W: ±2.5 W
- Input AC Power200/208 VAC, 3/PE~ (3W+G) 16A/PHASE
- RF ConnectorType N
- InterfaceStandard: RS-232 Subminiature, Type-D 9-pin digital, optional custom interface cards available.
- ReadoutDigital readout displays frequency and forward, reflected and load power.
- Rack Mounting19-inch adapters supplied
- CoolingWater
- Cooling SystemWater flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
- DimensionsRack Mount: 5.25 x 19 x 20.5 inches (133 x 483 x 521 mm.) (height x width x depth) (excluding handles & connectors)
- Weight55 lbs (24.9 kg)
- ComplianceNRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995