MKS' LIQUOZON® VariO3 is a dissolved ozone gas delivery system providing high purity ozone in ultrapure water for Semiconductor and Electronic Thin Film applications like contaminant removal and surface conditioning via wet clean or rinsing methods. The high redox potential of ozone causes rapid conversion back to oxygen making it an environmentally friendly alternative to other chemical processes.
Adjustable 1.0 to 3.0 barg (dependent on UPW supply pressure) without DIO3 Outlet Pump, Adjustable 1.4 to 3.7 barg (dependent on UPW supply and system pressure)with DIO3 Outlet Pump
Binary in/out (dry contacts), RS232, RS485, analog 4 - 20 mA in/out, USB (RS232 Com Port emulation)
Dimensions
1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
Weight
315-400 kg, depending on configuration
Compliance
CE, SEMI F47, SEMI S2
Technical Specs
Type
Ozone Water Delivery System
Ozone Concentration
3-90 ppm
Flow Rate
2-140 lpm
Operating Pressure
Adjustable 1.0 to 3.0 barg (dependent on UPW supply pressure) without DIO3 Outlet Pump, Adjustable 1.4 to 3.7 barg (dependent on UPW supply and system pressure)with DIO3 Outlet Pump
Binary in/out (dry contacts), RS232, RS485, analog 4 - 20 mA in/out, USB (RS232 Com Port emulation)
Dimensions
1810 x 800 x 610 mm (71.2 x 31.5 x 24.1 inches)Approximate (height x width x depth), Overall height including exhaust duct and adjustable feet: Approx. 2000 mm (79 inches)
Additional CAD file downloads are not available for this product.
LIQUOZON-VariO3 - Drawings
Additional drawings are not available for this product.
LIQUOZON-VariO3
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Ozonated Water Delivery System, 3-90 ppm, 2-140 lpm, Optional Recirculation