The LIQUOZON® Single, the most compact member of the MKS LIQUOZON® family of ultra-pure ozonated water (DIO3 water) generators, was specifically designed to supply DIO3 water to single-wafer cleaning tools. It is a compact, self-contained unit that provides ultra-pure ozonated water with a high and accurate ozone concentration at a constant delivery pressure. The unit delivers DIO3 water with ozone concentrations between 5 and 95 ppm at flow rates between 0.5 and 20 L/min and at a pressure of up to 2.5 bar (gauge) (0.25 MPa). LIQUOZON® Single has simple plug-and-play installation, exceptional reliability (MTBF >20,000 hours), extremely low maintenance requirements, and low operation cost.