R-Series Vacuum Gate Valve
R-Series Vacuum Gate Valve
The MKS R-Series Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor, solar, and other general vacuum applications. The R-Series Gate Valve is available with a range of options including lockout tagout capability, high temperature variants, and a variety of seal materials. The R-Series employs a robust elastomer shaft seal for the actuator seal which enables high performance in a cost effective, high value package for roughing vacuum applications.
- DN80, DN100, and DN160 sizes
- Stainless steel or aluminum versions
- Allows roughing pump to stay in operation during foreline maintenance
- High performance heater options See All Features
Configuration Options
The following options are available for R-Series Gate Valves
Ordering Code Example: GVRBD100SSPVNN20
| Configuration Option | Option Code |
|---|---|
| GVRB Gate Valve | GVRB |
| Valve Bore/Flange Size | |
| DN80 | D080 |
| DN100 | D100 |
| DN160 | D160 |
| Body Material | |
| Stainless Steel | SS |
| Aluminum1 | AL |
| Actuation | |
| Pneumatic | P |
| Manual | M |
| Pneumatic with Lockout Tagout | L |
| Seal Materials2 | |
| Viton/FKM | V |
| Kalrez 9100 | M |
| Kalrez 9500 | N |
| Bypass Option | |
| None | N |
| Limit Switches3 | |
| None | N |
| Limit Switch (Both Switches Normally Open) | L |
| Limit Switch (Both Switches Normally Closed) | C |
| Limit Switch (Valve Open Continuity)4 | D |
| Limit Switch (Valve Closed Continuity)5 | E |
| Solenoids6 | |
| None | 0 |
| 24 VDC | 2 |
| 12 VDC | 1 |
| Heating Options | |
| Heatable to 105°C | 0 |
| Heatable to 150°C | 1 |
| Other Options | |
| Contact MKS | 0 |
1 Contact MKS Applications – available in limited configurations.
2 Contact MKS Applications for alternate seal materials.
3 Switches have 2m long, unterminated flying leads.
4 Both limit switches have continuity when valve is in Open Position.
5 Both limit switches have continuity when valve is in Closed Position.
6 Contact MKS Applications for alternate solenoid configurations.
Specifications
- TypeR-Series Gate Valve
- Seal MaterialStandard: Viton® (FKM)
Optional: Chemraz®, Kalrez® compounds - ActuationDouble acting pneumatic or manual
- Actuation Time< 2 sec
- Actuator Temperature10-80°C
- Limit SwitchMagnetic Reed Switch: Current rating < 80mA
- Pressure Range1*10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
- Actuator SealElastomer shaft seal
- Solenoid Temperature10-50°C
- Body TemperatureViton Seals: 10-105°C
Optional Seals: 10-150°C - Pneumatic Pressure5.4 ±1.3 atm (80 ±20 psig)
- Side to Side Leak Rate1*10-9 atm*cc/sec
- External Leak Rate1*10-9 atm*cc/sec
- Max Delta Pressure - Operating<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar. - Max Delta Pressure - Closed1.6 atm, either direction
- Exposed MaterialsStainless Steel: 304L SS, 316L SS, 440C SS, Krytox LVP
Aluminum: 6061 AL, 304L SS, 316L SS, 440C SS, Krytox LVP - MaintenanceDN80: 200,000 cycles before maintenance
DN100: 200,000 cycles before maintenance
DN160: 100,000 cycles before maintenance
MTTR: 15 minutes; Can be serviced without removal from vacuum system
Resources
Literature
R Series Gate Valve(413.9 kB, PDF)
Drawings & CADs
R Series Gate Valve Dimensional Drawings(322.1 kB, PDF)