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GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators
Model: GHW-12
GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators
Model: GHW-12
Overview
Overview
The GHW50 13.56 MHz, 5 kW, RF Plasma Generator offers field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. GHW Series RF Plasma Generators are available at 208 VAC and 400/480 VAC. GHW RF plasma generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices. All MKS Instruments' RF Generators are NRTL certified and CE marked.
Technical Specs
- TypeRF Plasma Generator
- Frequency13.56 MHz ±0.005%
- Dynamic Power Range10 - 1250 W
- Power Output1.25 kW
- Load Impedance RangeUnlimited
- RF Stability/Spurious OutputUnconditionally stable for any load within operational limits <-45dBc
- Harmonic Output & Distortion<-40dBc
- Load Mismatch ProtectionAutomatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
- Regulation Tolerance>125 W: ±1.5% SP, <125 W: ± 3.0 W
- Input AC Power200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
- RF ConnectorType N
- InterfaceStandard: RS-232 Subminiature Type-D 9-pin digital, optional custom interface cards available.
- ReadoutDigital readout displays frequency and forward, reflected and load power.
- Rack MountingEIA (Standard) 19 inch adapters supplied
- CoolingWater
- Cooling SystemWater flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
- DimensionsRack Mount: 3.5 x 19 x 20.0 inches (89 x 483 x 508 mm) (height x width x depth)
- Weight32.5 lbs. (14.8 kg)
- ComplianceNRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995
Technical Specs
- TypeRF Plasma Generator
- Frequency13.56 MHz ±0.005%
- Dynamic Power Range10 - 1250 W
- Power Output1.25 kW
- Load Impedance RangeUnlimited
- RF Stability/Spurious OutputUnconditionally stable for any load within operational limits <-45dBc
- Harmonic Output & Distortion<-40dBc
- Load Mismatch ProtectionAutomatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
- Regulation Tolerance>125 W: ±1.5% SP, <125 W: ± 3.0 W
- Input AC Power200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
- RF ConnectorType N
- InterfaceStandard: RS-232 Subminiature Type-D 9-pin digital, optional custom interface cards available.
- ReadoutDigital readout displays frequency and forward, reflected and load power.
- Rack MountingEIA (Standard) 19 inch adapters supplied
- CoolingWater
- Cooling SystemWater flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
- DimensionsRack Mount: 3.5 x 19 x 20.0 inches (89 x 483 x 508 mm) (height x width x depth)
- Weight32.5 lbs. (14.8 kg)
- ComplianceNRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995