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E27E 0.1-1000 Torr Heated (45°C) Baratron® Ethernet Capacitance Manometer with Etch Sensor
Model: E27E.1TCED5B1
E27E 0.1-1000 Torr Heated (45°C) Baratron® Ethernet Capacitance Manometer with Etch Sensor
Model: E27E.1TCED5B1

Overview
Overview
The E27E.1TCED5B1 Baratron® Ethernet-Enabled, 45°C Heated Absolute Capacitance Manometer, with an Etch Sensor features a 0.1 Torr full scale pressure range, a Swagelok® 8 VCR® female fitting, horizontal calibration, and a 15-pin "D" type analog connector with thread lock. Like other MKS Ethernet-equipped products, E27E Series manometers include embedded Internet browser software that allows it to communicate with any Windows®-based PC. Since the Ethernet port operates in parallel to the standard analog communications, the device can be diagnosed on a real-time basis during processing – a huge benefit for users who perform their own system analysis and troubleshooting. Even for users who do not use Ethernet networking, the E27E also has external LEDs to give a fast intuitive guide to the device’s status. The E27E is equipped with the MKS patented Etch sensor that greatly reduces manometer drift in processes with condensable byproducts.
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer with Etch Sensor
- Measurement TypeAbsolute
- Sensor Temperature45°C
- Full Scale Range0.1 Torr
- Accuracy0.15% of Reading
- Resolution0.001% of Full Scale
- Fitting Type8 VCR female
- Communication ProtocolEthernet
- Analog Output0 - 10 VDC
- Analog Connector15-pin D-sub with Thread Locks
- Digital ConnectorRJ45 Ethernet
- CalibrationHorizontal
- Zero Temperature Coefficient0.005% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15 - 40°C
- Volume6.3 cc
- Warm-up Time4 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Power Requirements±15VDC ± 5% or +24VDC ± 5% @ 300 mA
- IndicatorsMulticolor status LED and two green LEDs for Ethernet communications status
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer with Etch Sensor
- Measurement TypeAbsolute
- Sensor Temperature45°C
- Full Scale Range0.1 Torr
- Accuracy0.15% of Reading
- Resolution0.001% of Full Scale
- Fitting Type8 VCR female
- Communication ProtocolEthernet
- Analog Output0 - 10 VDC
- Analog Connector15-pin D-sub with Thread Locks
- Digital ConnectorRJ45 Ethernet
- CalibrationHorizontal
- Zero Temperature Coefficient0.005% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15 - 40°C
- Volume6.3 cc
- Warm-up Time4 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Power Requirements±15VDC ± 5% or +24VDC ± 5% @ 300 mA
- IndicatorsMulticolor status LED and two green LEDs for Ethernet communications status
Resources & Downloads
Drawings & CADs
E27E Baratron® Capacitance Manometer Dimensional Drawing(101.1 kB, PDF)
Literature
627E / 628E / E27E / E28E Baratron® (Archive)(256.5 kB, PDF)