Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
Model: DA02B11TCES24C00
Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
Model: DA02B11TCES24C00
Overview
Overview
The DA02B11TCES24C00 Baratron® 45° C Temperature-controlled, Digital, EtherCAT® Capacitance Manometer features 10 Torr full scale pressure measurement and has a Swagelok® 8 female VCR® fitting. Based on the proven 627 and 628 Ethernet-equipped e-Baratron products, the EtherCAT Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems. It uses the exact same Inconel®-based capacitance sensor as current MKS Baratron manometer products, offering the same long lifetime, low maintenance, and high corrosion resistance as current analog Baratron capacitance manometers.
Technical Specs
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TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
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Sensor Temperature45°C
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Full Scale Range10 Torr
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Accuracy0.10% of Reading
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Fitting Type8 VCR female
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Communication ProtocolEtherCAT
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Output Signal0-10 VDC
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Analog Connector15-pin D-sub
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Digital Connector2 RJ45 EtherCAT jacks
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CalibrationStandard
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Zero Temperature Coefficient0.002% of Full Scale/°C
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Span Temperature Coefficient0.02% of Reading/°C
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Operating Temperature Range15-40°C
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Volume6.3 cc
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Warm-up Time2 hours
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Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
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Exposed MaterialsInconel® and Incoloy® nickel alloys
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Trip PointsNone
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ComplianceCE
Resources & Downloads
Drawings & CADs
- DA02A Baratron® Capacitance Manometer Dimensional Drawings (131.9 kB, PDF)
Heated Capacitance Manometer, 10 Torr, 45°C, 8 VCR-F, EtherCAT RJ45, DB15, Standard Calibration
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