Loadlock Vacuum Transducer, MicroPirani-Piezo, 8 VCR-F, RS485

Technical Specs

  • Absolute Measurement Range
    1.0 x 10-5 to 1500 Torr
  • Differential Measurement Range
    -760 to +760 Torr
  • Digital Communication
    RS485
  • Type
    Vacuum Transducer
  • Sensor
    MicroPirani™ (MEMS Thermal Conductivity)and Piezo differential (MEMS diaphragm)
  • Display
    No
  • Seal Material
    Viton
  • Enclosure
    Standard
  • Electrical Connector
    15-pin, High Density, D-sub male
  • Interface
    RS485/analog
  • Relays
    3
  • Fitting Type
    8 VCR female
  • Installation Orientation
    Any
  • Set Point Range
    Absolute: 5.0 x 10-4 Torr to 1000 Torr. Differential: -760 to 100 Torr
  • Calibration Gas
    Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon
  • Operating Temperature
    0 - 40°C (32 - 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F)
  • Digital Controls
    Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
  • Digital Status
    Absolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
  • Analog Output
    1-9 VDC (1 VDC per Decade)
  • Analog Output Resolution
    16 bit
  • Optional Analog Output 2
    5 VDC = 0 Torr, 1 VDC/decade (Piezo Differential)
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Relay Response
    100 msec maximum
  • Power Requirements
    9 - 30 VDC, <1.2 Watts maximum
  • MicroPirani Accuracy
    5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading
  • MicroPirani Repeatability
    1 x 10-3 to 100 Torr ±2% of reading
  • Piezo Differential Accuracy
    -10 to 10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, 10 to 100 Torr ±5% of Reading
  • Piezo Differential Repeatability
    -760 to 10 Torr ±1% of Reading
  • Piezo Differential Zero Stability
    ±0.1% of Full Scale (Full Scale = 760 Torr)
  • Overpressure Limit
    1500 Torr (absolute)
  • Exposed Materials
    Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
  • Electronic Casing and Flange
    304 stainless steel
  • Compliance
    CE
  • Analog Output 2 Resolution
    12 bit
  • Digital Baud Rates
    4800 - 230400 Baud

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