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20kW Pulsed DC Plasma Generator

The RPDG-200 is a 20,000W Asymmetric Bipolar Pulsed DC system that enables deposition of a wide variety of low defect insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. The system is comprised of a pulse master unit driving a 20kW DC slave providing up to 20kW in a single output.

20,000 W asymmetric bipolar pulsed DC generator
For Reactive* PVD, CVD Bias and Hard Coating
Programmable frequency and duty cycle
Independent bias power supply for superior management of reverse excursion

See All Features

Specifications

Type
RPDG-200 20kW Pulsed DC Plasma Generator
Frequency
Programmable from 25 to 125 kHz or 50 to 250 kHz (Range set by factory)
Duty Cycle
Programmable from 0 to 40% (Reverse Bias)
Power Output
20kW
Power Limit
21kW for rated 20kW output; proportional at other power levels
Current Limit
42A
Regulation Modes
Volts, Amps, Watts
Output Control Modes
Ramping, Run Time, Joule, Sequence, Constant Run
DC Linearity/Accuracy Independent of Regulation Mode
±0.1%: 10-100% of rated output
DC Linearity/Accuracy in Watts Mode
±0.25%: 1-10% of rated output
Line Regulation
±0.1% for ±10% line voltage change ±2% line frequency change
Load Regulation
±0.1% for a 4:1 load impedance range
Line Voltage and Current
AC Input (3-phase) Max: 200 - 208V (-7.5%+10%) 12A (pulse) 85A (slave)
400V: (±10%) 6A (pulse) 45A (slave)
480V: (±10%) 5A (pulse) 40A (slave)
Line Frequency
50 and 60 Hz, ±2%
Line-to-Output Efficiency
>85%
Input Power Factor
>0.7 at maximum power output

Fully Functional Front Panel
Provides complete control and monitoring from the master unit
Remote Front Panel
Provides complete remote control and monitoring functions
Blank Front Panel
Three LEDs indicate AC On, DC On, and Fault
Cooling System
Forced air - front panel & right side in, rear panel out
Weight
55 lbs (25kg) per 3U unit
Dimensions
5.22 x 18.9 x 24.8 inches (132.5 x 480 x 631 mm) (H x W x D) including rack mount & handles
Compliance
CE, CAN/CSA-C22.2 No. 61010.1, UL 61010-1, IEC 68-2-9 test for bump, IEC 68-2-6 test for vibration, IEC 68-2-23 test for bump
Operating Temperature
5 to 40°C
Relative Humidity
< 95% non-condensing
Maximum Operating Altitude
+3500 meters above sea level
Digital and Analog Interface Connections
9-pin Type D with RS232/422 ENI Protocol, 25 pin Analog
Optional Interface Connections
PROFIBUS®, DNET™
Output Connections
UHF female or Terminal Block
AC Input Connections
5 terminal barrier strip
Interlock Connections
2 terminal PC header
Rack Mounting
EIA (Standard)
Universal JIS Bracket (optional)

Resources

Literature

RPDG-200 20kW Pulsed DC Plasma Generato (archive)r(256.5 kB, PDF)