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1579A Elastomer-sealed 50-300 slm Mass Flow Controller
Model: 1579A00412LR1BV
1579A Elastomer-sealed 50-300 slm Mass Flow Controller
Model: 1579A00412LR1BV
Overview
Overview
The 1579A00412LR1BV mass flow controller comes with a Full Scale range of 100 slm of Argon, 8 VCR male fittings, a 15-pin D-subminiature connector, and a 0-5 VDC flow input/output signal. in a compact design. The 1579 is based on proven MKS technology and offers a fast controller settling time as well as high accuracy in the entire control range. This makes it possible to integrate the 1579 into fast cycle processes in which the idle time for the stabilization of the process conditions has to be minimal and reproducible. Due to its compact design, the 1579 allows space-saving designs of gas supply systems.
Technical Specs
- TypeMass Flow Controller
- Calibration GasArgon
- Control Range2 - 100 slm
- Full Scale Flow Range100 slm
- Fitting Type8 VCR male
- Flow Input Output Signal0 - 5 VDC
- Analog I/O Connector15-pin D-sub
- Seal MaterialViton
- Maximum Inlet Pressure100 psig
- Normal Operating Pressure Differential15 - 60 psid
- Typical Accuracy±1% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution16 Bit
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.10% of Full Scale/°C
- Pressure Coefficient±0.02% of Reading/psi
- Warm-up Time<30 min
- Typical Settling Time<1 sec
- Operating Temperature15 - 40°C (59 - 104°F)
- Power Requirements20.5 - 30 VDC, maximum 300 mA
- Set Point Command Signal0 - 5 VDC from <20 kOhm
- Wetted Materials316L stainless steel, Nickel, Viton®
- External Leak Integrity<1 x 10-9 scc/sec He
- Leak Integrity Through Closed Valve<0.1% of Full Scale
- ComplianceCE
- Valve StateNormally Closed
Technical Specs
- TypeMass Flow Controller
- Calibration GasArgon
- Control Range2 - 100 slm
- Full Scale Flow Range100 slm
- Fitting Type8 VCR male
- Flow Input Output Signal0 - 5 VDC
- Analog I/O Connector15-pin D-sub
- Seal MaterialViton
- Maximum Inlet Pressure100 psig
- Normal Operating Pressure Differential15 - 60 psid
- Typical Accuracy±1% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution16 Bit
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.10% of Full Scale/°C
- Pressure Coefficient±0.02% of Reading/psi
- Warm-up Time<30 min
- Typical Settling Time<1 sec
- Operating Temperature15 - 40°C (59 - 104°F)
- Power Requirements20.5 - 30 VDC, maximum 300 mA
- Set Point Command Signal0 - 5 VDC from <20 kOhm
- Wetted Materials316L stainless steel, Nickel, Viton®
- External Leak Integrity<1 x 10-9 scc/sec He
- Leak Integrity Through Closed Valve<0.1% of Full Scale
- ComplianceCE
- Valve StateNormally Closed
Resources & Downloads
Drawings & CADs
Literature
1579 Mass Flow Controller for High Flow Rates (Archive)(172.9 kB, PDF)