Absolute Pressure Switch, 100 Torr, 100C, NW16 ISO-KF, Fail Safe DPDT
Model: 142AA-00100DB
Absolute Pressure Switch, 100 Torr, 100C, NW16 ISO-KF, Fail Safe DPDT
Model: 142AA-00100DB

Overview
Overview
The 142AA-00100DB Heated Absolute Pressure Switch features 100 Torr full scale pressure measurement and a size NW16 ISO-KF fitting. It includes double pole Form C relay contacts that are energized when pressure is below the set point for Fail-safe operation. The 142A is a heated to 100°C, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Designed for applications where a DC signal output is not required, the 142A provides relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron® capacitance manometer principle of operation, the 142A senses the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual ''above set point'' indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.
Technical Specs
- TypeVacuum Pressure Switch
- Measurement TypeAbsolute
- Full Scale Range100 Torr
- Set Point Range0.2 - 100 Torr
- Sensor Temperature100°C
- Fitting TypeNW16 ISO-KF
- Accuracy±0.5% of range (± temperature coefficients)
- Zero Temperature Coefficient±0.015% of Full Scale/°C
- Span Temperature Coefficient±0.03% of set point/°C
- Operating Temperature Range20 - 70°C
- Response Time<20 msec from 0 to Full Scale
- Relay ModeEnergizes below set point
- Relay Contact RatingsDPDT, 2 amps @ 30 VDC or 1 amp @ 120 VAC resistive
- Exposed MaterialsInconel and 316 S.S.
- Internal Volume7.0 cc
- Overpressure120% of Full Scale or 35 psia (1000 mmHg), whichever is larger
- Power Requirements20 - 30 VDC, 1.2 A
Technical Specs
- TypeVacuum Pressure Switch
- Measurement TypeAbsolute
- Full Scale Range100 Torr
- Set Point Range0.2 - 100 Torr
- Sensor Temperature100°C
- Fitting TypeNW16 ISO-KF
- Accuracy±0.5% of range (± temperature coefficients)
- Zero Temperature Coefficient±0.015% of Full Scale/°C
- Span Temperature Coefficient±0.03% of set point/°C
- Operating Temperature Range20 - 70°C
- Response Time<20 msec from 0 to Full Scale
- Relay ModeEnergizes below set point
- Relay Contact RatingsDPDT, 2 amps @ 30 VDC or 1 amp @ 120 VAC resistive
- Exposed MaterialsInconel and 316 S.S.
- Internal Volume7.0 cc
- Overpressure120% of Full Scale or 35 psia (1000 mmHg), whichever is larger
- Power Requirements20 - 30 VDC, 1.2 A
