1291
MKS Instruments
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
PC
Pressure Controller FS
PPC
EtherCAT PPC
3000
5000
5000
200
100
4000
true
PC
5003
2037
#xa0
#x4a0
Moment of inertia
g cm^2
#xa1
#x4a1
revolution speed
rad/s
#xa3
#x4a3
Increments
inc
#x22
#x422
Pascal
P
#xa0
#x4a0
Normalized Pressure
FFS
#x41
#x441
Angle Degree
deg
#xa1
#x4a1
Torr
T
#xa3
#x4a3
Pounds per square inch absolute
psia
#xa2
#x4a2
Atmosphere
atm
#xc0
#x4c0
Percent
%
BIT2
2
BOOL
1
BYTE
8
DINT
32
INT
16
REAL
32
UDINT
32
UINT
16
ULINT
64
USINT
8
STRING(7)
56
STRING(0)
0
STRING(2)
16
STRING(3)
24
STRING(11)
88
DT1018
144
0
SubIndex 000
USINT
8
0
ro
1
Vendor ID
UDINT
32
16
ro
2
Product code
UDINT
32
48
ro
3
Revision Number
UDINT
32
80
ro
4
Serial number
UDINT
32
112
ro
DT1600
144
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
4
SubIndex 004
UDINT
32
112
rw
DT1601
144
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
4
SubIndex 004
UDINT
32
112
rw
DT1A00
112
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
DT1A01
432
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
4
SubIndex 004
UDINT
32
112
rw
5
SubIndex 005
UDINT
32
144
rw
6
SubIndex 006
UDINT
32
176
rw
7
SubIndex 007
UDINT
32
208
rw
8
SubIndex 008
UDINT
32
240
rw
9
SubIndex 009
UDINT
32
272
rw
10
SubIndex 010
UDINT
32
304
rw
11
SubIndex 011
UDINT
32
336
rw
12
SubIndex 012
UDINT
32
368
rw
13
SubIndex 013
UDINT
32
400
rw
DT1C00ARR
USINT
32
1
4
DT1C00
48
0
SubIndex 000
USINT
8
0
ro
Elements
DT1C00ARR
32
16
ro
DT1C12ARR
UINT
32
1
2
DT1C12
48
0
SubIndex 000
USINT
8
0
rw
Elements
DT1C12ARR
32
16
rw
DT1C13ARR
UINT
32
1
2
DT1C13
48
0
SubIndex 000
USINT
8
0
rw
Elements
DT1C13ARR
32
16
rw
DT1C32
488
0
SubIndex 000
USINT
8
0
ro
1
Synchronization Type
UINT
16
16
rw
2
Cycle Time
UDINT
32
32
ro
3
Shift Time
UDINT
32
64
ro
4
Synchronization Types supported
UINT
16
96
ro
5
Minimum Cycle Time
UDINT
32
112
ro
6
Calc and Copy Time
UDINT
32
144
ro
7
Minimum Delay Time
UDINT
32
176
ro
8
Get Cycle Time
UINT
16
208
rw
9
Delay Time
UDINT
32
224
ro
10
Sync0 Cycle Time
UDINT
32
256
rw
11
SM-Event Missed
UINT
16
288
ro
12
Cycle Time Too Small
UINT
16
304
ro
32
Sync Error
BOOL
1
480
ro
DT1C33
488
0
SubIndex 000
USINT
8
0
ro
1
Synchronization Type
UINT
16
16
rw
2
Cycle Time
UDINT
32
32
ro
3
Shift Time
UDINT
32
64
ro
4
Synchronization Types supported
UINT
16
96
ro
5
Minimum Cycle Time
UDINT
32
112
ro
6
Calc and Copy Time
UDINT
32
144
ro
7
Minimum Delay Time
UDINT
32
176
ro
8
Get Cycle Time
UINT
16
208
rw
9
Delay Time
UDINT
32
224
ro
10
Sync0 Cycle Time
UDINT
32
256
rw
11
SM-Event Missed
UINT
16
288
ro
12
Cycle Time Too Small
UINT
16
304
ro
32
Sync Error
BOOL
1
480
ro
DT6001
48
0
SubIndex 000
USINT
8
0
ro
1
Pressure Reading [REAL]
REAL
32
16
ro
T
DT6002
48
0
SubIndex 000
USINT
8
0
ro
1
Temperature Reading [REAL]
REAL
32
16
ro
T
DT6005
32
0
SubIndex 000
USINT
8
0
ro
1
Pressure Reading [INT]
INT
16
16
ro
T
DT6006
32
0
SubIndex 000
USINT
8
0
ro
1
Temperature Reading [INT]
INT
16
16
ro
T
DT6009
48
0
SubIndex 000
USINT
8
0
ro
1
Actuator Setpoint [REAL]
REAL
32
16
ro
T
DT600F
24
0
SubIndex 000
USINT
8
0
ro
1
Service In Progress
BOOL
1
16
ro
T
2
Invalid Data Input
BOOL
1
17
ro
T
3
Ramp Active
BOOL
1
18
ro
T
4
Valve Control Mode (fully-open)
BOOL
1
19
ro
T
5
Valve Control Mode (fully-closed)
BOOL
1
20
ro
T
DT7003
48
0
SubIndex 000
USINT
8
0
ro
1
Pressure SP [REAL]
REAL
32
16
rw
R
DT7007
32
0
SubIndex 000
USINT
8
0
ro
1
Pressure SP [INT]
INT
16
16
rw
R
DT7008
48
0
SubIndex 000
USINT
8
0
ro
1
Ramp Time
UDINT
32
16
rw
R
DT7009
24
0
SubIndex 000
USINT
8
0
ro
1
Actuator Control
USINT
8
16
rw
R
DT8001
48
0
SubIndex 000
USINT
8
0
ro
1
Pressure Data Unit
UDINT
32
16
rw
1
DT8002
48
0
SubIndex 000
USINT
8
0
ro
1
Temperature Data Unit
UDINT
32
16
rw
1
DT8007
176
0
SubIndex 000
USINT
8
0
ro
1
Kp
REAL
32
16
rw
1
2
Ki
REAL
32
48
rw
1
3
Kd
REAL
32
80
rw
1
4
Windup LL
REAL
32
112
rw
1
5
Windup UL
REAL
32
144
rw
1
DT8008
48
0
SubIndex 000
USINT
8
0
ro
1
Max Ramp Time
UDINT
32
16
rw
1
DT8009
24
0
SubIndex 000
USINT
8
0
ro
1
Safe State
USINT
8
16
rw
1
DT800A
24
0
SubIndex 000
USINT
8
0
ro
1
Index
USINT
8
16
rw
1
DT9000
48
0
SubIndex 000
USINT
8
0
ro
1
Flow Reading Zero Offset
REAL
32
16
ro
1
DT9001
144
0
SubIndex 000
USINT
8
0
ro
1
Pressure Sensor Full Scale
REAL
32
16
ro
1
2
Pressure Reading Zero Offset
REAL
32
48
ro
1
3
Pressure High Threshold Alarm
REAL
32
80
ro
1
4
Pressure Low Threshold Alarm
REAL
32
112
ro
1
DT9002
112
0
SubIndex 000
USINT
8
0
ro
1
Temperature Sensor Full Scale
REAL
32
16
ro
1
2
Temp High Threshold Alarm
REAL
32
48
ro
1
3
Temp Low Threshold Alarm
REAL
32
80
ro
1
DT9003
24
0
SubIndex 000
USINT
8
0
ro
1
Direction
USINT
8
16
ro
1
DT9008
48
0
SubIndex 000
USINT
8
0
ro
1
Min Ramp Time
UDINT
32
16
ro
1
STRING(20)
160
STRING(10)
80
ARRAY [0..159] OF BYTE
BYTE
1280
0
160
DTF000
48
0
SubIndex 000
USINT
8
0
ro
1
Module index distance
UINT
16
16
ro
2
Maximum number of modules
UINT
16
32
ro
DTF010ARR
UDINT
32
1
1
DTF010
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF010ARR
32
16
ro
DTF030ARR
UDINT
32
1
1
DTF030
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF030ARR
32
16
rw
DTF050ARR
UDINT
32
1
1
DTF050
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF050ARR
32
16
ro
DTF381ARR
UDINT
32
1
1
DTF381
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF381ARR
32
16
ro
T
DTF383ARR
UDINT
32
1
1
DTF383
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF383ARR
32
16
ro
T
DTF391ARR
UDINT
32
1
1
DTF391
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF391ARR
32
16
ro
T
DTF393ARR
UDINT
32
1
1
DTF393
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF393ARR
32
16
ro
T
DTF3A1ARR
UDINT
32
1
1
DTF3A1
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF3A1ARR
32
16
rw
1
DTF3A3ARR
UDINT
32
1
1
DTF3A3
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF3A3ARR
32
16
rw
1
DTF6F0ARR
UDINT
32
1
1
DTF6F0
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF6F0ARR
32
16
ro
T
STRING(25)
200
DTF9F1ARR
UDINT
32
1
1
DTF9F1
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F1ARR
32
16
ro
DTF9F2ARR
UDINT
32
1
1
DTF9F2
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F2ARR
32
16
ro
DTF9F4ARR
STRING(3)
24
1
1
DTF9F4
40
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F4ARR
24
16
ro
DTF9F5ARR
USINT
8
1
1
DTF9F5
24
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F5ARR
8
16
rw
TR
ARRAY [0..1] OF BYTE
BYTE
16
0
2
DTFB10
72
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..1] OF BYTE
16
56
ro
DTFB11
72
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..1] OF BYTE
16
56
ro
ARRAY [0..5] OF BYTE
BYTE
48
0
6
ARRAY [0..0] OF BYTE
BYTE
8
0
1
DTFBF0
88
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..5] OF BYTE
48
16
rw
2
Status
USINT
8
64
ro
3
Response
ARRAY [0..1] OF BYTE
16
72
ro
ARRAY [0..4] OF BYTE
BYTE
40
0
5
DTFBF1
80
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..4] OF BYTE
40
16
rw
2
Status
USINT
8
56
ro
3
Response
ARRAY [0..1] OF BYTE
16
64
ro
ARRAY [0..3] OF BYTE
BYTE
32
0
4
DTFBF2
72
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..1] OF BYTE
16
56
ro
DTFBF4
72
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..1] OF BYTE
16
56
ro
ARRAY [0..24] OF BYTE
BYTE
200
0
25
DTFBF3
104
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..5] OF BYTE
48
56
ro
Outputs
Inputs
MBoxState
MBoxOut
MBoxIn
Outputs
Inputs
#x1600
Outputs (Default)
#x7003
1
32
Pressure SP
REAL
#x7009
01
8
Actuator Control
USINT
#x0
0
32
Position SP
REAL
#x7008
1
32
RampTime
UDINT
#x1601
Outputs (User)
#x1a00
Inputs ( Default)
#xF380
0
8
Active Exception Status
USINT
#x6001
1
32
Pressure Reading
REAL
#x6009
1
32
Actuator Current
REAL
#x1a01
Inputs (User)
2498
1000
1000
2048
800E84040A000200000000800000
00100C0400180C04