1291
MKS Instruments
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
MFC
Mass Flow Controller
G Series MFC
G Series EtherCAT MFC
3000
5000
5000
200
100
2000
true
MFC
5003
2021
BOOL
1
DINT
32
ULINT
64
REAL
32
UDINT
32
INT
16
UINT
16
USINT
8
BYTE
8
DT1C12ARR
UINT
32
1
2
DT1C12
48
0
SubIndex 000
USINT
8
0
rw
Elements
DT1C12ARR
32
16
rw
DT1C13ARR
UINT
32
1
2
DT1C13
48
0
SubIndex 000
USINT
8
0
rw
Elements
DT1C13ARR
32
16
rw
DT7009
24
0
SubIndex 000
USINT
8
0
ro
1
Control Mode
USINT
8
16
rw
ARRAY [0..3] OF BYTE
BYTE
32
0
4
ARRAY [0..24] OF BYTE
BYTE
200
0
25
DTFBF3
256
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..24] OF BYTE
200
56
rw
DT8008
48
0
SubIndex 000
USINT
8
0
ro
1
Max Ramp
UDINT
32
16
rw
ARRAY [0..0] OF BYTE
BYTE
8
0
1
DTFBF2
64
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..3] OF BYTE
32
16
rw
2
Status
USINT
8
48
ro
3
Response
ARRAY [0..0] OF BYTE
8
56
rw
ARRAY [0..4] OF BYTE
BYTE
40
0
5
DTFBF1
72
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..4] OF BYTE
40
16
rw
2
Status
USINT
8
56
ro
3
Response
ARRAY [0..0] OF BYTE
8
64
rw
STRING(9)
72
STRING(3)
24
STRING(5)
40
DT9000
48
0
SubIndex 000
USINT
8
0
ro
1
Flow Offset
REAL
32
16
ro
DT9008
48
0
SubIndex 000
USINT
8
0
ro
1
Min Ramp Time
UDINT
32
16
ro
DT900A
2048
0
SubIndex 000
USINT
8
0
ro
1
Index
BOOL
1
16
ro
2
Gas Standard Number
UINT
16
24
ro
3
Symbol
STRING(20)
160
40
ro
4
Name
STRING(20)
160
200
ro
5
Min Fullscale
REAL
32
360
ro
6
Max Fullscale
REAL
32
392
ro
7
Fullscale
REAL
32
424
ro
8
Min Flow SP
REAL
32
456
ro
9
Max Flow SP
REAL
32
488
ro
10
Bin ID
UINT
16
520
ro
11
Gas Cal File Rev
UINT
16
536
ro
12
Gas Table Rev
UINT
16
552
ro
13
Factory Cal Date
STRING(12)
96
568
ro
14
Last Cal Date
STRING(12)
96
664
ro
15
Number Of Cal Points
USINT
8
760
ro
16
Cardinal Points
ARRAY [0..159] OF BYTE
1280
768
ro
DT7003
48
0
SubIndex 000
USINT
8
0
ro
1
Setpoint
REAL
32
16
rw
r
DT8009
24
0
SubIndex 000
USINT
8
0
ro
1
Safe State
USINT
8
16
rw
ARRAY [0..5] OF BYTE
BYTE
48
0
6
DTFBF0
80
0
SubIndex 000
USINT
8
0
ro
1
Command
ARRAY [0..5] OF BYTE
48
16
rw
2
Status
USINT
8
64
ro
3
Response
ARRAY [0..0] OF BYTE
8
72
rw
DTFB10
232
0
SubIndex 000
USINT
8
0
ro
1
Target
ARRAY [0..24] OF BYTE
200
16
rw
2
Status
USINT
8
216
ro
3
Response
ARRAY [0..0] OF BYTE
8
224
rw
STRING(25)
200
DT1600
144
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
4
SubIndex 004
UDINT
32
112
rw
DT600F
24
0
SubIndex 000
USINT
8
0
ro
1
Service In Progress
BOOL
1
16
ro
2
Invalid Data Input
BOOL
1
17
ro
3
Ramp Active
BOOL
1
18
ro
4
Vlv Control - Open
BOOL
1
19
ro
5
Vlv Control - Closed
BOOL
1
20
ro
6
Vlv Control Position
BOOL
1
21
ro
DT800A
24
0
SubIndex 000
USINT
8
0
ro
1
Active Gas
USINT
8
16
rw
DT1601
144
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
4
SubIndex 004
UDINT
32
112
rw
DT1C32
392
0
SubIndex 000
USINT
8
0
ro
1
Sync mode
UINT
16
16
rw
2
Cycle time
UDINT
32
32
ro
3
Shift time
UDINT
32
64
ro
4
Sync modes supported
UINT
16
96
ro
5
Minimum cycle time
UDINT
32
112
ro
6
Calc and copy time
UDINT
32
144
ro
7
Reserved
UDINT
32
176
rw
8
Get Cycle Time
UINT
16
208
rw
9
Delay time
UDINT
32
224
ro
10
Sync0 time
UDINT
32
256
rw
11
SM event missed counter
UDINT
32
288
ro
12
Cycle exceeded counter
UDINT
32
320
ro
13
Shift too short counter
UDINT
32
352
ro
32
Sync error
BOOL
1
384
ro
DT1C33
392
0
SubIndex 000
USINT
8
0
ro
1
Sync mode
UINT
16
16
rw
2
Cycle time
UDINT
32
32
ro
3
Shift time
UDINT
32
64
ro
4
Sync modes supported
UINT
16
96
ro
5
Minimum cycle time
UDINT
32
112
ro
6
Calc and copy time
UDINT
32
144
ro
7
Reserved
UDINT
32
176
rw
8
Get Cycle Time
UINT
16
208
rw
9
Delay time
UDINT
32
224
ro
10
Sync0 time
UDINT
32
256
rw
11
Cycle exceeded counter
UDINT
32
288
ro
12
SM event missed counter
UDINT
32
320
ro
13
Shift too short counter
UDINT
32
352
ro
32
Sync error
BOOL
1
384
ro
DT1A00
112
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
STRING(20)
160
STRING(12)
96
ARRAY [0..159] OF BYTE
BYTE
1280
0
160
DT6000
48
0
SubIndex 000
USINT
8
0
ro
1
Flow
REAL
32
16
ro
t
DT6004
32
0
SubIndex 000
USINT
8
0
ro
1
Flow
INT
16
16
ro
t
DTF381ARR
UDINT
32
1
1
DTF381
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF381ARR
32
16
ro
DTF391ARR
UDINT
32
1
1
DTF391
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF391ARR
32
16
ro
DT1A01
144
0
SubIndex 000
USINT
8
0
rw
1
SubIndex 001
UDINT
32
16
rw
2
SubIndex 002
UDINT
32
48
rw
3
SubIndex 003
UDINT
32
80
rw
4
SubIndex 004
UDINT
32
112
rw
DTF9F2ARR
UDINT
32
1
1
DTF9F2
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F2ARR
32
16
ro
DTF9F1ARR
UDINT
32
1
1
DTF9F1
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F1ARR
32
16
ro
DTF3A3ARR
UDINT
32
1
1
DTF3A3
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF3A3ARR
32
16
rw
DTF3A1ARR
UDINT
32
1
1
DTF3A1
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF3A1ARR
32
16
rw
DT1C00ARR
USINT
32
1
4
DT1C00
48
0
SubIndex 000
USINT
8
0
ro
Elements
DT1C00ARR
32
16
ro
DTF383ARR
UDINT
32
1
1
DTF383
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF383ARR
32
16
ro
DT7008
48
0
SubIndex 000
USINT
8
0
ro
1
Ramp Rate
UDINT
32
16
rw
r
DTF9F4ARR
BYTE
200
1
1
DTF9F4
216
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F4ARR
200
16
ro
DT6009
48
0
SubIndex 000
USINT
8
0
ro
1
Vlv Current Readback
REAL
32
16
rw
DT8000
48
0
SubIndex 000
USINT
8
0
ro
1
Data Unit
UDINT
32
16
rw
DTF393ARR
UDINT
32
1
1
DTF393
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF393ARR
32
16
ro
DTF000
48
0
SubIndex 000
USINT
8
0
ro
1
Module index distance
UINT
16
16
ro
2
Maximum number of modules
UINT
16
32
ro
DTF010ARR
UDINT
32
1
1
DTF010
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF010ARR
32
16
ro
DTF9F5ARR
USINT
8
1
1
DTF030ARR
UDINT
32
1
1
DTF030
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF030ARR
32
16
ro
DTF050ARR
UDINT
32
1
1
DTF050
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF050ARR
32
16
ro
DTF9F5
24
0
SubIndex 000
USINT
8
0
ro
Elements
DTF9F5ARR
8
16
rw
DTF6F0ARR
UDINT
32
1
1
DTF6F0
48
0
SubIndex 000
USINT
8
0
ro
Elements
DTF6F0ARR
32
16
ro
DT1018
144
0
SubIndex 000
USINT
8
0
ro
1
Vendor ID
UDINT
32
16
ro
2
Product code
UDINT
32
48
ro
3
Revision
UDINT
32
80
ro
4
Serial number
UDINT
32
112
ro
DT7007
32
0
SubIndex 000
USINT
16
0
ro
1
Setpoint
INT
16
16
rw
r
Outputs
Inputs
MBoxOut
MBoxIn
Outputs
Inputs
#x1600
Outputs (Default)
#x7003
1
32
Flow SP
REAL
#x7009
01
8
Actuator Control
USINT
#x0
0
32
Position SP
REAL
#x7008
1
32
RampTime
UDINT
#x1601
Outputs (User)
#x1a00
Inputs ( Default)
#xF380
0
8
Active Exception Status
USINT
#x6000
1
32
Flow Reading
REAL
#x6009
1
32
Actuator Current
REAL
#x1a01
Inputs (User)
0
2048
0506034464000000050000000000
00100C0200180C02