Specifications

  • Type
    PC99 Absolute Pressure Controller with Mass Flow Meter
  • Pressure Range
    1000 Torr, 2000 Torr, 100 Psia
  • Fitting Type
    Swagelok 4 VCR Male, 1-1/8” surface mount (C-seal, W-seal)
  • Valve Position
    Normally Closed or Normally Open
  • Valve Seat
    PTFE (Teflon) or Sapphire (Metal)
  • Flow Rate
    (sccm) 50, 200, 1000, 5000, 10000, 20000, 30000
  • Trip Points
    Two open collector transistors, adjustable from 0 to 100% of Full Scale
    Rated Current: 30VDC/250mA
    State: On, above, or below trip point
    Hysteresis: 3% of Full Scale (factory set)
    Status: LEDs Red when the transistor is on
  • Pressure Readout Units
    (For all Torr Full Scale ranges) Torr, kPa; (For Psi Full Scale Range) Psi, kPa
  • Pressure Resolution
    0.1 Torr for 0 to 100 Torr, 1 Torr for >1000 Torr, 0.1 Psi for 0 to 100 Psi
  • Pressure Control Accuracy
    ± 0.2% of Full Scale (< 10% Full Scale); ± 1.0% of Reading (≥ 10% Full Scale)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 Psid
  • Burst Pressure
    1500 Psig
  • Control Mode
    Downstream
  • Pressure Measurement Accuracy
    ± 1.0% of Reading
  • Zero Temperature Coefficient
    ± 0.02% of Full Scale /°C
  • Span Temperature Coefficient
    ± 0.04% of Reading /°C
  • Control Range
    > 2 to 100% of Full Scale
  • Typical Response Time
    < 1.0 second
  • Operating Temperature
    10 to 50°C (50 to 122°F)
  • Storage Temperature
    -20 to 80°C (-4 to 176°F)
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10
  • Leak Integrity Through Closed Valve
    <1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
  • Flow Measurement Range
    2% to 100% of Full Scale
  • Flow Repeatability
    ± 0.2% of Full Scale
  • Flow Resolution
    0.1% of Full Scale
  • Flow Accuracy
    ± 1.0% of Reading >10% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Flow Span Temperature Coefficient
    < 0.08% of Reading/°C
  • Flow Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel® 718, 825 Incoloy®
    Optional: (Valve Seat) PTFE (Teflon) or Sapphire (Metal)
  • Surface Finish
    5 µinches, average Ra
  • Input Power
    +15 to +24 VDC @ 350mA max
  • Connector
    15-pin Type “D” Male
  • Set Point
    0 to 10 VDC (Default), 0 to 5 VDC (User Switchable)
  • Flow Output Signal
    0 to 5 VDC
  • Analog Output Minimum Impedance
    < 1 Ω
  • Power Required
    DeviceNet: +11 to +25 VDC per DeviceNet specification (@ <3.5 watts)
    RS485: +15 to +24 VDC @ 350mA max
  • Connector-Interface
    DeviceNet: 5 pin microconnector (DeviceNet)
    RS485: 9 pin Type D male
  • Data Rate Switch
    DeviceNet: 4 positions: 125, 250, 500K (Default), PGM (programmable over the network)
    RS485: 3 positions: 9.6, 19.2, 38.4K (Default)
  • DeviceNet Communication Rate
    125 - 500 Kbps (user selectable)
  • RS485CommunicationRate
    9.6 - 38.4 Kbps (user selectable)
  • MAC ID Switches
    DeviceNet: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers; (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
    RS485: 2 switches, 10 positions; 0,0 to 9,9. Available MAC ID’s are 3,2 to 9,9.
  • Network Topology
    DeviceNet: Linear (trunkline/dropline) power and signal on same network cable
    RS485: Master/slave
  • Network Size
    DeviceNet: Up to 64 nodes
    RS485: Up to 32 nodes
  • Indicators
    DeviceNet: LED network status (green/red) LED module status (green/red), Scrolling LED displays (piPC Type, Pressure Full Scale, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)) Push Button Display toggles between (Pressure in TORR & KPA or PSI & KPA, Flow, Temperature and Scrolling display)
    RS485: LED network status (green/red) LED module status (green/red)
  • Temperature Readout Units
    °C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Temperature Display Range
    0 to 100°C
  • Weight
    < 3 lbs (1.36 kg)

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