Configuration Options

Description
CLEANLINE Foreline Plasma Clean System

Features

  • Cleanline performance ~ 1 µm of SiO2 powder removed, over 1 meter of pipe, in 1 minute
  • Conductance is equivalent to an open section of pipe for full process transparency
  • Plasma source can be heated to 150°C
  • Reliable ignition in process gas

Specifications

KF40 KF50 ISO 80 mm
Wetted Materials 316L Stainless
Aluminum Nitride
Kalrez® 9500
316L Stainless
Aluminum Nitride
Kalrez® 9500
6061-T6 Aluminum
Aluminum Nitride
Kalrez® 9500
Flanges KF40 KF50 ISO80
Length 3.175.in [80.6 mm] 3.25.in [82.5 mm] 7.15.in [181.6 mm]
Inner Diameter 1.41.in [35.8 mm]
(same as KF40 pipe)
2.10.in [35.8mm]
(Same as KF50 pipe)
2.86.in [72.64 mm]
(same as ISO 80mm pipe)
Max Mechanical Axial Force 200 lbf Tensile or Compressive
Weight 2 lb 3.6 lb 9.5 lb
Max Mechanical Moment 100 ft*lb 100 ft*lb 200 ft*lb
Max Operating Temperature <150°C
Gas Input: NF3 or F2
(with matching Argon flow)
<3 slm <5 slm <6 slm
Operating Pressure Range 0.15 - 3 Torr 0.15 – 3 Torr 0.25 – 5 Torr
Plasma Power (fixed) 50 W 50 W 200 W
Plasma Ignition Any condition within Operating Flow and Pressure window; Optionally 100% Argon ( 0.25 – 5 Torr, <6 slm)
Typical Pipe Clean Rate Up to 20 mg/min SiO2 powder
~60 sec/meter of 40mm pipe/µm of SiO2 powder
Up to 20 mg/min SiO2 powder
~60 sec / meter of 50mm pipe / µm of SiO2 powder
Up to 100 mg/min SiO2 powder
~60 sec/meter of 80mm pipe/µm of SiO2 powder
Typical Electrode Lifetime 2000 RF Hours
Helium Leak Rate 1 e-9 atm*cc/sec
Compliance CE
RoHS 2021
SEMI S2

Power Supply/Controller Specifications
Dimensions 5.5.in W x 5.in H x 12.in D [139.7 mm W x 127 mm H x 304.8 mm D]
Input Power 100 – 132 VAC 50/60 Hz 6A Service (400W typical)
200 – 264 VAC 50/60 Hz, 6A Service (switch selectable)
Ambient Temperature 10-40°C Non-condensing
Weight 10 lbs
Cooling Air Cooled, Rear Panel Fan (requires 2.in of clearance)
RF Output 1 Mhz
Interface 24 VDC Discrete Logic
Input: Plasma On Command
Output: Ready, RF On, Plasma On, Plasma Fault
Diagnostics Ethernet Web Page Diagnostics via Front Panel RJ45

Need help?

Contact an Applications Specialist by sending us an email